One problem encountered in teaching this course was the lack of an adequate
textbook. Although semiconductor physics is covered to some extent
in all advanced textbooks on condensed matter physics, the treatment rarely
provides the level of detail satisfactory to research students. Well-established
books on semiconductor physics are often found to be too theoretical by experimentalists
and engineers. As a result, an extensive list of reading materials
initially replaced the textbook. Moreover, semiconductor physics being a mature
field, most of the existing treatises concentrate on the large amount of
The book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It is intended as a text for undergraduate students in applied physics, electrical and electronics engineering, and materials science. It can also serve as a reference for graduate students and
practicing engineers as well as scientists who are not familiar with the subject or need an update on device and technology developments.
